TSMC 28 nm Process Reverse Engineering

Chipworks has produced an interesting report with some good TEM crossections of the most advanced products of Nvidia, Altera, Xilinx, Qualcomm and others fabricated on TSMC 28nm process.


"The 28 nm generation was the first time TSMC used high-k metal gate (HKMG) transistors. The HP and HPL technologies feature HKMG transistors, while the LP uses conventional poly gates, with an ONO gate dielectric."



Ron
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